Electrical, structural and optical properties of fluorine-doped zinc oxide thin films: Effect of the solution aging time

被引:37
作者
Rozati, S. M. [1 ]
Moradi, S. [1 ]
Golshahi, S. [1 ]
Martins, R. [2 ]
Fortunato, E. [2 ]
机构
[1] Univ Guilan, Dept Phys, Rasht 41335, Iran
[2] Univ Nova Lisboa, Fac Sci & Technol, Mat Sci Dept CENIMAT, P-2829516 Caparica, Portugal
关键词
ZnO; ZnO:F; Spray pyrolysis; TCO; TRANSPARENT; TEMPERATURE; GROWTH; IZO; ITO;
D O I
10.1016/j.tsf.2009.03.231
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this paper ageing effects of the solution used to prepare fluorine-doped ZnO films by the spray pyrolysis technique were investigated, concerning its role on the structure, the electrical and optical properties of films produced. The data reveal that the sheet resistance of the ZnO:F thin film decreases with the age of the solution used. reaching a minimum of 24 Omega/square, after 15 days. On the other hand the optical transmittance increases for films deposited using 6 days aging solution, decreasing afterwards as the aging time increases. being the optical transmittance in the visible range below 55%, for films deposited from solutions 36 days in age. The X-ray diffraction spectra show that the aged films are polycrystalline in nature with a [100] predominant orientation. The data also show that the intensity of (100) peak increases as the time of solution age increases, which is related to an improvement of the film crystallinity. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:1279 / 1282
页数:4
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