Electrical measurements of the quality factor of microresonators and its dependence on the pressure

被引：16

作者：

Bruschi, P ^{[1
]}

Nannini, A ^{[1
]}

Pieri, F ^{[1
]}

机构：

[1] Univ Pisa, Dipartimento Ingn Informaz, I-56122 Pisa, Italy

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2004年 / 114卷 / 01期

关键词：

MEMS resonators; quality factor; slide-film; squeeze-film;

D O I：

10.1016/j.sna.2004.01.059

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The pressure dependence of the quality factors of several lateral microelectromechanical resonators is measured, by exploiting an electrical, non-linear second harmonic method that eliminates the effect of capacitive parasitics without requiring additional driving and/or frequency conversions. Analytical models for the possible causes of energy loss due to the residual gas surrounding the resonators, namely slide-film and squeeze-film losses, are compared with the experimental data. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：21 / 29

页数：9

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