Technique for thermal isolation of antenna-coupled infrared microbolometers

被引：28

作者：

Middleton, C. F. ^{[1
]}

Boreman, G. D. ^{[1
]}

机构：

[1] Univ Cent Florida, CREOL, Coll Opt & Photon, Orlando, FL 32816 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2006年 / 24卷 / 05期

关键词：

D O I：

10.1116/1.2335434

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new method was developed to thermally isolate monolithic antenna-coupled infrared microbolometers from their substrate. Using a SiO2 sacrificial layer to create a 400 mn thick Si3N4 membrane, square spiral antennas coupled to Ni microbolometers were fabricated and tested. The responsivity of the thermally isolated devices is 164 times greater than a similar device that is not fabricated on a membrane. (c) 2006 American Vacuum Society.

引用

页码：2356 / 2359

页数：4