Molded plastic micro-cavity lasers

被引:11
作者
Nilsson, D [1 ]
Nielsen, T [1 ]
Kristensen, A [1 ]
机构
[1] Tech Univ Denmark, MIC, Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark
关键词
nano-imprint lithography; micro-molding; laser; dye; PMMA;
D O I
10.1016/j.mee.2004.02.070
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel fabrication method, based on a combination of the well-known nano-imprint lithography technique, micro-molding and bonding of two polymer layers is presented. As a first demonstration, a nano-imprinted micro-cavity plastic dye laser suitable for integration into lab-on-a-chip micro-systems is fabricated. The polymer polymethyl methacrylate (PMMA) is used due to its high transparency in the visible range and its robustness to laser radiation. As the active material for laser, amplification, the laser dye Rhodamine 6G ClO4 was chosen due to its strong fluorescence and good robustness to heating. The 1.5-mum thick dye-doped PMMA devices have the lateral shapes of either a trapezoid or a triangle. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:372 / 376
页数:5
相关论文
共 50 条
  • [41] Pulse Energy Optimization in Multipass-Cavity Mode-Locked Femtosecond Lasers
    Mostafazadeh, Aref
    Cankaya, Huseyin
    Sennaroglu, Alphan
    IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2015, 21 (01) : 71 - 78
  • [42] Spatially resolved thermal characterization of packaged vertical cavity surface-emitting lasers
    Pellegrino, L
    Bagnoli, PE
    Madella, M
    Piccirillo, A
    IEEE TRANSACTIONS ON COMPONENTS AND PACKAGING TECHNOLOGIES, 1999, 22 (02): : 245 - 251
  • [43] Contacting InP based micro disk lasers on 200 mm Si wafers
    Mandorlo, F.
    Romeo, P. Rojo
    Letartre, X.
    Regreny, P.
    Viktorovitch, P.
    Mandorlo, F.
    Fedeli, J. M.
    Grosse, P.
    2008 IEEE 20TH INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS (IPRM), 2008, : 338 - +
  • [44] Laser beam removal of micro-structures with Nd:YAG-Lasers
    Hellrung, D
    Gillner, A
    Poprawe, R
    LASERS IN MATERIAL PROCESSING, 1997, 3097 : 267 - 273
  • [45] 3-D micro-structuring with F2 lasers
    Tönshoff, HK
    von Alvensleben, F
    Ostendorf, A
    Körber, K
    Kulik, C
    MICRO-OPTO-ELECTRO-MECHANICAL SYSTEMS, 2000, 4075 : 159 - 166
  • [46] Customized decorating of plastic parts with gray scale and multi-color images using lasers
    McKee, TJ
    Toth, L
    Sauerer, W
    ANTEC'97 - PLASTICS SAVING PLANET EARTH, CONFERENCE PROCEEDINGS, VOLS 1 - 3, 1997, : 3793 - 3797
  • [47] Ultrashort pulse lasers in high-rate laser micro processing - Quo vadis?
    Schille, Joerg
    Loeschner, Udo
    ADVANCED OPTICAL TECHNOLOGIES, 2021, 10 (4-5) : 233 - 237
  • [48] Micro-opto-mechanical systems: applications in pulsed fiber lasers and optical switching
    Peter, YA
    Rochat, E
    Herzig, HP
    MICROELECTRONIC STRUCTURES AND MEMS FOR OPTICAL PROCESSING III, 1997, 3226 : 102 - 111
  • [49] Formation of Micro-lens Array using Femtosecond and CO2 lasers
    Choi, Hun-Kook
    Ryu, Jinchang
    Kim, Chanju
    Noh, Young-Chul
    Sohn, Ik-Bu
    Kim, Jin-Tae
    JOURNAL OF LASER MICRO NANOENGINEERING, 2016, 11 (03): : 341 - 345
  • [50] High-Finesse Micro-Optical Fabry-Perot Cavity and Its Applications in Strongly Coupled Cavity Quantum Electrodynamics
    Zhang Tiancai
    Wu Wei
    Yang Pengfei
    Li Gang
    Zhang Pengfei
    ACTA OPTICA SINICA, 2021, 41 (01)