Microwatt-Powered, Low-Cost, Printed Graphene Oxide Humidity Sensors for Distributed Network Applications

被引:1
|
作者
Taylor, Anthony P. [1 ]
Velasquez-Garcia, Luis F. [2 ]
机构
[1] Edwards Vacuum LLC, Sanborn, NY 14132 USA
[2] MIT, Microsyst Technol Labs, Cambridge, MA 01239 USA
来源
15TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2015) | 2015年 / 660卷
关键词
ELECTROSPRAY EMITTERS; METAL-OXIDES; ARRAY;
D O I
10.1088/1742-6596/660/1/012134
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
We report the design, fabrication, and characterization of novel conductometric humidity sensors that employ an ultrathin film of graphene oxide (GO) nanoflakes as transducing element. The GO film is deposited with a shadow mask using an electrospray emitter operated at atmospheric pressure; no post treatments-including annealing or doping-were applied to the GO sensors. The Van der Pauw electrode structure used in the sensor had 50 mu m linewidths separated by 600 mu m and was fabricated with the lift-off metallization technique. In dynamic humidity tests conducted at atmospheric pressure, the sensor tracks the response of a commercial sensor and reacts to changes in humidity in less than 500 ms. There is a quadratic dependence of the relative humidity on the sensor resistance for the relative humidity range between 3% and 63%, with more than a three-fold change in resistance over the range. The power consumption of the sensor is less than 30 mu W while drawing 7 mu A, and less than 15 mu W while drawing 5 mu A. Our devices are promising candidates for deployment in a distributed sensor network due to their low cost, small size, and low power consumption.
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页数:5
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