Melting and crystallization of nanocrystalline silicon microwires through rapid self-heating

被引:16
作者
Bakan, G. [1 ]
Cywar, A. [1 ]
Silva, H. [1 ]
Gokirmak, A. [1 ]
机构
[1] Univ Connecticut, Dept Elect & Comp Engn, Storrs, CT 06269 USA
关键词
crystallisation; electrical resistivity; elemental semiconductors; melting; nanostructured materials; scanning electron microscopy; silicon; solidification; INDUCED LATERAL CRYSTALLIZATION; THIN-FILM TRANSISTORS; ELECTRICAL-RESISTIVITY; NANOWIRE CHANNELS; LOW-TEMPERATURE; SI;
D O I
10.1063/1.3159877
中图分类号
O59 [应用物理学];
学科分类号
摘要
Nanocrystalline silicon microwires are self-heated through single, large amplitude, and microsecond voltage pulses. Scanning electron micrographs show very smooth wire surfaces after the voltage pulse compared to as-fabricated nanocrystalline texture. Voltage-pulse induced self-heating leads to significant conductance improvement, suggesting crystallization of the wires. The minimum resistivity during the pulse is extracted from wires of different dimensions as 75.0 +/- 4.6 mu cm, matching previously reported values for liquid silicon. Hence, nanocrystalline silicon microwires melt through self-heating during the voltage pulse and resolidify upon termination of the pulse, resulting in very smooth and less-resistive crystalline structures.
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页数:3
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