Low temperature NbSi thin film thermometers on Silicon Nitride membranes for bolometer applications

被引：7

作者：

Camus, P

Bergé, L

Dumoulin, L

Marnieros, S

Torre, JP

机构：

[1] Inst Astrophys Spatiale, F-91405 Orsay, France

[2] Ctr Spectrometrie Nucl & Spectrometrie Masse, CNRS, IN2P3, F-91405 Orsay, France

[3] CNRS, Serv Aeron, F-91371 Verrieres Buisson, France

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2000年 / 444卷 / 1-2期

关键词：

Amorphous films - Calorimetry - Composition effects - Millimeter waves - Niobium compounds - Semiconducting silicon compounds - Sensitivity analysis - Thermal conductivity of solids - Thermometers - Thin films;

D O I：

10.1016/S0168-9002(99)01414-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We report the design of amorphous NbSi thin film bolometer thermometers on Silicon Nitride membranes. Due to the low-thermal conductivity of Si3N4, this material has several applications in millimeter wavelength bolometers and microcalorimetry. Compared to NTD-Ge thermometers, similar sensitivities are obtained with a 50 times lesser volume. The smallest realized films have a rectangular surface (100 x 400 mu m(2)) and are 100 nm thick. Optimization of the thermometer shape, NbSi composition and electrical material contact is discussed. The goal of this development is to manufacture a complete array of bolometers by photolithography techniques. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：419 / 422

页数：4

共 5 条

[1] Progress in low temperature thin film thermometers [J].