Influence of substrate temperature on the structure and optical properties of ZnO thin films grown by pulsed laser deposition

被引：0

作者：

Sun Bai ^{[1
]}

Zou Chong-Wen ^{[1
]}

Liu Zhong-Liang ^{[1
]}

Xu Peng-Shou ^{[1
]}

Zhang Guo-Bin ^{[1
]}

机构：

[1] Univ Sci & Technol China, Natl Synchrotron Radiat Lab, Hefei 230029, Peoples R China

来源：

JOURNAL OF INORGANIC MATERIALS | 2006年 / 21卷 / 04期

关键词：

zinc oxide; pulsed laser deposition; photoluminescence; synchrotron radiation; CHEMICAL-VAPOR-DEPOSITION; ZINC-OXIDE; PHOTOLUMINESCENCE; LUMINESCENCE; PLD; PRESSURE; CENTERS; VIOLET;

D O I：

暂无

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Highly c-axis oriented ZnO thin films were fabricated on Si(111) substrates at different substrate temperatures by pulsed laser deposition X-ray diffraction and atom force microscope were employed to characterize the structure and surface morphology of the deposited ZnO films. The optical properties of the ZnO thin films were investigated by photoluminescence with He-Cd laser and synchrotron radiation as light source. The ZnO thin films grown at 500 degrees C show good crystallinity and intense UV emission. We also observed the violet emission centering about 430nm of ZnO films excited by synchrotron radiation at 18K. The violet luminescence is ascribed to the defects related to the interface traps existing at the grain boundaries, which probably originate from interstitial zinc(Zn-i).

引用

页码：1005 / 1010

页数：6

共 21 条

[1]

[Anonymous], APPL PHYS LETT

[2] BULK ELECTRON TRAPS IN ZINC-OXIDE VARISTORS [J].

CORDARO, JF ;

SHIM, Y ;

MAY, JE .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (12) :4186-4190

[3] Luminescence and nonradiative deactivation of excited states involving oxygen defect centers in polycrystalline ZnO [J].

Egelhaaf, HJ ;

Oelkrug, D .

JOURNAL OF CRYSTAL GROWTH, 1996, 161 (1-4) :190-194

[4] Microstructure and photoluminescence properties of ZnO thin films grown by PLD on Si(111) substrates [J].

Fan, XM ;

Lian, JS ;

Guo, ZX ;

Lu, HJ .

APPLIED SURFACE SCIENCE, 2005, 239 (02) :176-181

[5] CONTROL OF PREFERRED ORIENTATION FOR ZNOX FILMS - CONTROL OF SELF-TEXTURE [J].

FUJIMURA, N ;

NISHIHARA, T ;

GOTO, S ;

XU, JF ;

ITO, T .

JOURNAL OF CRYSTAL GROWTH, 1993, 130 (1-2) :269-279

[6] Violet and UV luminescence emitted from ZnO thin films grown on sapphire by pulsed laser deposition [J].

Jin, BJ ;

Im, S ;

Lee, SY .

THIN SOLID FILMS, 2000, 366 (1-2) :107-110

[7] The grain size effects on the photoluminescence of ZnO/α-Al2O3 grown by radio-frequency magnetron sputtering [J].

Kim, KK ;

Song, JH ;

Jung, HJ ;

Choi, WK ;

Park, SJ ;

Song, JH .

JOURNAL OF APPLIED PHYSICS, 2000, 87 (07) :3573-3575

[8] Effects of oxygen pressure on the growth of pulsed laser deposited ZnO films on Si(001) [J].

Kim, SS ;

Lee, BT .

THIN SOLID FILMS, 2004, 446 (02) :307-312

[9] Effect of the growth temperature on ZnO thin films grown by plasma enhanced chemical vapor deposition [J].

Li, BS ;

Liu, YC ;

Zhi, ZZ ;

Shen, DZ ;

Lu, YM ;

Zhang, JY ;

Kong, XG ;

Fan, XW .

THIN SOLID FILMS, 2002, 414 (02) :170-174

[10] Green luminescent center in undoped zinc oxide films deposited on silicon substrates [J].

Lin, BX ;

Fu, ZX ;

Jia, YB .

APPLIED PHYSICS LETTERS, 2001, 79 (07) :943-945

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