Extraction of COM parameters on Pt/LGS for high temperature SAW sensor

被引：18

作者：

Aubert, Thierry ^{[1
]}

Sarry, Frederic ^{[1
]}

Elmazria, Omar ^{[1
]}

Bouvot, Laurent ^{[1
]}

Assouar, Badreddine ^{[1
]}

Nicolay, Pascal ^{[1
]}

Hehn, Michel ^{[2
]}

机构：

[1] Nancy Univ, Lab Phys Milieux Ionises & Applicat, CNRS, UMR 7040, F-54506 Vandoeuvre Les Nancy, France

[2] Univ Nancy 1, Phys Mat Lab, CNRS, UMR 7756, F-54506 Vandoeuvre Les Nancy, France

来源：

2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX | 2008年

关键词：

LGS; Pt; FEM/SDA; COM; theoretical results; experimental results; high temperature;

D O I：

10.1109/ULTSYM.2008.0197

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

This work is oriented on the used of effective simulation tools to design high temperature SAW sensor. Physical constants of platinum and LGS and related temperature coefficients recently determined were implemented in FEM/SDA program. Plessky's parameters of the Pt/LGS structure were extracted for various temperatures and injected in COM software to calculate frequency response of SAW devices. A comparison between experimental and theoretical results showed good agreement up to 250 degrees C and the requirement of a new LGS constants set.

引用

页码：820 / +

页数：2

共 14 条

[1] Modelling of SAW filter based on ZnO/diamond/Si layered structure including velocity dispersion [J].