Preparation of CHF3 plasma polymeric composite membrane and characteristics of surface modification

Low temperature rf-plasma was used to create a plasma-treated polymeric composite membrane made from CHF3, a material that is very thermally and chemically stable. The chemical and physical properties of the CHF3 plasma polymers were variously changed by plasma treatment on membrane surface. CHF3, plasma polymers were efficiently deposited on an aluminum oxide substrate with a pore size of 0.02 mu m at the plasma polymerization time 60 min, the rf-power 160 W, and the flow rate of the CHF3 16 seem. It was found that O-2 plasma treatment had a much greater effect on the surface roughness of the CHF3 plasma polymers than did Ar or N-2 plasma treatment. The attachment of functional groups to the CHF3 plasma polymer surface as a result of plasma treatment increased the intensity of the oxygen functional group peak. It also increased the oxygen content and the O/C ratio. The plasma treatment also made to the surface that became to hydrophilic. The most effective hydrophilic surface modification occurred when the composite parameter ranged from 300-450 kJ.s/kg. It was confirmed that the gas permeability and selectivity changed as a result of crosslinking, chemical etching, and the importing of functional groups to the CHF3 plasma polymeric membrane.