Miniature temperature-insensitive Fabry-Perot fiber-optic pressure sensor

被引：35

作者：

Xu, Juncheng ^{[1
]}

Wang, Xingwei ^{[1
]}

Cooper, Kristie L. ^{[1
]}

Pickrell, Gary R. ^{[1
]}

Wang, Anbo ^{[1
]}

机构：

[1] Virginia Polytech Inst & State Univ, Dept Elect & Comp Engn, Ctr Photon Technol, Blacksburg, VA 24061 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2006年 / 18卷 / 9-12期

关键词：

Fabry-Perot (FP); fiber-optic sensor; miniature sensor; pressure sensor;

D O I：

10.1109/LPT.2006.873361

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a miniature fiber-optic pressure sensor with a diameter of only 125 mu m. The sensor works as an extrinsic Fabry-Perot interferometer and the cavity length can be controlled with a resolution of about several nanometers. Also the sensor sensitivity can be easily adjusted by controlling the sensor gauge length. A passive temperature compensation scheme was used to reduce most of the sensor's temperature dependence. Since the sensor is composed entirely of fused silica, it is reliable, bio-compatible, corrosion resistant, and immune to electromagnetic interference and has high-temperature capability.

引用

页码：1134 / 1136

页数：3

共 12 条

[1]

Cibula E., 2002, Proceedings of IEEE Sensors 2002. First IEEE International Conference on Sensors (Cat. No.02CH37394), P711, DOI 10.1109/ICSENS.2002.1037190

[2] IN-LINE FIBER FABRY-PEROT-INTERFEROMETER WITH HIGH-REFLECTANCE INTERNAL MIRRORS [J].