共 28 条
[2]
CONTURSI L, 1992, Patent No. 0481563
[3]
Dean J.A., 1985, LANGES HDB CHEM, V13
[5]
Goldberg Y, 2001, PROPERTIES OF ADVANCED SEMICONDUCTOR MATERIALS: GAN, AIN, INN, BN, SIC, SIGE, P31
[6]
HU GU, 2007, Patent No. 1893265
[7]
Kim HM, 2002, ADV MATER, V14, P991, DOI 10.1002/1521-4095(20020705)14:13/14<991::AID-ADMA991>3.0.CO
[8]
2-L
[9]
KINEMUCHI Y, 2001, PULSED POWER PLASMA, V17, P558