Note: A piezo tip/tilt platform: Structure, kinematics, and experiments

被引:5
作者
Du, Z. [1 ]
Su, Y. [1 ]
Yang, W. [1 ]
Dong, W. [1 ]
机构
[1] Harbin Inst Technol, State Key Lab Robot & Syst, Harbin 150080, Peoples R China
关键词
TILT-PISTON MICROMIRROR; LATERAL-SHIFT; DESIGN;
D O I
10.1063/1.4870062
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A Piezo Tip/Tilt Platform ((PTP)-P-2) is presented with its structure, kinematics, and preliminary experiments. Two essential models of the presented (PTP)-P-2, an equivalent hinge of the flexure hinge and a simplified model of the transmission mechanism, are discussed with the analysis on the structure of the (PTP)-P-2. Based on these models, the inverse kinematics of the (PTP)-P-2 is derived. Two experiments are conducted on a prototype of the (PTP)-P-2. The kinematic model is verified with experimental results, which also indicate that the resolution and the repeatability of the (PTP)-P-2 is, respectively, better than 0.50 mu rad and 0.25 mu rad. (C) 2014 AIP Publishing LLC.
引用
收藏
页数:3
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