Alumina coatings deposited with reactive DC magnetron sputtering in a CO2/O2 gas mixture

被引:7
作者
Rother, B [1 ]
机构
[1] MAT GmbH Dresden, D-01257 Dresden, Germany
关键词
aluminum oxide; magnetron; direct current; hardness; wear;
D O I
10.1016/S0257-8972(02)00014-2
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Reactive DC magnetron sputtering was applied for the deposition of amorphous alumina coatings. Transparent coatings with a thickness of up to 2 vm were deposited on hardened high-speed steel, silicon (wafer material) and S'3N, ceramics with typical growth rates in the region of 0.35 mum/h. The chemical composition of the coatings is comparable to alumina coatings deposited with reactive pulsed magnetron sputtering. The coatings were characterized by depth-sensing indentation measurements and by friction experiments before and after thermal treatments. The hardness and elastic modulus of the as-deposited coatings amount to 10-15 and 250-350 GPa, respectively. After annealing at 500 degreesC under atmospheric conditions, an increase in the hardness and the elastic modulus was observed. The friction coefficient of the coatings before and after thermal treatment against sintered tungsten carbide/cobalt balls amounts to 0.3-0.4. (C) 2002 Elsevier Science B.V All rights reserved.
引用
收藏
页码:262 / 267
页数:6
相关论文
共 12 条
[1]   Anode effects on energetic particle bombardment of the substrate in pulsed magnetron sputtering [J].
Bartzsch, H ;
Frach, P ;
Goedicke, K .
SURFACE & COATINGS TECHNOLOGY, 2000, 132 (2-3) :244-250
[2]  
BEHNCKE HH, 1993, HTM, V48, P304
[3]  
BUCKLE H, 1965, MICROHARDNESS MEASUR
[4]   Comparative characterization of alumina coatings deposited by RF, DC and pulsed reactive magnetron sputtering [J].
Cremer, R ;
Witthaut, M ;
Neuschütz, D ;
Erkens, G ;
Leyendecker, T ;
Feldhege, M .
SURFACE & COATINGS TECHNOLOGY, 1999, 120 :213-218
[5]  
Hoffmann V, 1996, FRESEN J ANAL CHEM, V355, P826
[6]   Voltage controlled reactive sputtering process for aluminium oxide thin films [J].
Koski, K ;
Holsa, J ;
Juliet, P .
THIN SOLID FILMS, 1998, 326 (1-2) :189-193
[7]   ENERGY PRINCIPLE OF INDENTATION CONTACT - THE APPLICATION TO SAPPHIRE [J].
NOWAK, R ;
SAKAI, M .
JOURNAL OF MATERIALS RESEARCH, 1993, 8 (05) :1068-1078
[8]   AN IMPROVED TECHNIQUE FOR DETERMINING HARDNESS AND ELASTIC-MODULUS USING LOAD AND DISPLACEMENT SENSING INDENTATION EXPERIMENTS [J].
OLIVER, WC ;
PHARR, GM .
JOURNAL OF MATERIALS RESEARCH, 1992, 7 (06) :1564-1583
[9]   Tribological characterisation of hard coatings on steel [J].
Rother, B ;
Herrmann, U .
SURFACE & COATINGS TECHNOLOGY, 2001, 142 :132-136
[10]   EVALUATION OF COATING SUBSTRATE INTERFACE STRENGTH BY DIFFERENTIAL LOAD FEED ANALYSIS OF LOAD-INDENTATION MEASUREMENTS [J].
ROTHER, B ;
DIETRICH, DA .
THIN SOLID FILMS, 1994, 250 (1-2) :181-186