A fast method for analysis and modeling of optical MEMS switches

被引:1
作者
Basha, MA [1 ]
Rohani, A [1 ]
Safavi-Naeini, S [1 ]
机构
[1] Univ Waterloo, Dept Elect & Comp Engn, Waterloo, ON N2L 3G1, Canada
来源
MEMS: 2001 MICROELECTROMECHANICAL SYSTEMS CONFERENCE | 2002年
关键词
D O I
10.1109/MEMSC.2001.992741
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A fast and accurate method for modeling ad analysis of Optical MEMS switches is developed. The method is a combination of BPM, 3D-Guassian Beam Tracing (GBT), Physical optics, and Electromagnetic Reciprocity Theory. The initial results show a great agreement between the simulated and measurements results for three different structures.
引用
收藏
页码:54 / 57
页数:4
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