A fast method for analysis and modeling of optical MEMS switches

被引：1
|
作者：
Basha, MA [1 ]
Rohani, A [1 ]
Safavi-Naeini, S [1 ]
机构：
[1] Univ Waterloo, Dept Elect & Comp Engn, Waterloo, ON N2L 3G1, Canada
来源：
MEMS: 2001 MICROELECTROMECHANICAL SYSTEMS CONFERENCE | 2002年
关键词：
D O I：
10.1109/MEMSC.2001.992741
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A fast and accurate method for modeling ad analysis of Optical MEMS switches is developed. The method is a combination of BPM, 3D-Guassian Beam Tracing (GBT), Physical optics, and Electromagnetic Reciprocity Theory. The initial results show a great agreement between the simulated and measurements results for three different structures.
引用
收藏
页码：54 / 57
页数：4
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