Impurity dominated thin film growth

被引：25

作者：

Cougnon, F. G. ^{[1
]}

Dulmaa, A. ^{[1
]}

Dedoncker, R. ^{[1
]}

Galbadrakh, R. ^{[2
]}

Depla, D. ^{[1
]}

机构：

[1] Univ Ghent, Dept Solid State Sci, Krijgslaan 281 S1, B-9000 Ghent, Belgium

[2] Natl Univ Mongolia, Dept Phys, Ulaanbaatar 14201, Mongolia

来源：

APPLIED PHYSICS LETTERS | 2018年 / 112卷 / 22期

关键词：

GRAIN-GROWTH; MECHANICAL-PROPERTIES; DEPOSITION PARAMETERS; STRESS; OXYGEN; MICROSTRUCTURE; NUCLEATION; TEXTURE; AL; COEFFICIENT;

D O I：

10.1063/1.5021528

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Magnetron sputter deposition was applied to grow thin metal films in the presence of impurities. These impurities are ambient gas molecules and/or atoms from the residual gas present in the vacuum chamber. Seven materials were investigated: four single element metals (Al, Ag, Cu, and Cr), two widely applied alloys (Cu55Ni45 and Ni90Cr10), and one high entropy alloy (CoCrCuFeNi). The thin films were analyzed using X-ray diffraction to determine the domain size, the film texture, and the lattice parameter. The same trend for all studied materials is observed. When the ratio between the impurity and metal flux towards the substrate is low, the domain size is not affected by the presence of the impurities. In this regime, the incorporation of the impurities affects the lattice parameter. At high flux ratios, the change of the domain size can be described by a power law with the exponent equal to -1/2 for all studied materials. A kinetic Monte Carlo code is used to demonstrate this observed trend. Published by AIP Publishing.

引用

页数：5

共 46 条

[1] Columnar structures in polycrystalline thin films developed by competitive growth [J].

Adamik, M ;

Barna, PB ;

Tomov, I .

THIN SOLID FILMS, 1998, 317 (1-2) :64-68

[2] Correlation between texture and average grain size in polycrystalline Ag thin films [J].

Adamik, M ;

Barna, PB ;

Tomov, I .

THIN SOLID FILMS, 2000, 359 (01) :33-38

[3] Texture evolution in stratified Al thin films [J].

Adamik, M ;

Tomov, I ;

Barna, PB .

SOLID STATE PHENOMENA, 1997, 56 :213-218

[4] A three-dimensional polyhedral unit model for grain boundary structure in fcc metals [J].

Banadaki, Arash Dehghan ;

Patala, Srikanth .

NPJ COMPUTATIONAL MATERIALS, 2017, 3

[5] FORMATION OF ALUMINUM THIN-FILMS IN THE PRESENCE OF OXYGEN AND NICKEL [J].

BARNA, A ;

BARNA, PB ;

RADNOCZI, G ;

REICHA, FM ;

TOTH, L .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1979, 55 (02) :427-435

[6] Fundamental structure forming phenomena of polycrystalline films and the structure zone models [J].

Barna, PB ;

Adamik, M .

THIN SOLID FILMS, 1998, 317 (1-2) :27-33

[7] ELLIPSOMETRIC AND X-RAY SPECULAR REFLECTION STUDIES ON NATURALLY GROWN OVERLAYERS ON ALUMINUM THIN-FILMS [J].

BARNA, PB ;

BODO, Z ;

GERGELY, G ;

CROCE, P ;

ADAM, J ;

JAKAB, P .

THIN SOLID FILMS, 1984, 120 (04) :249-256

[8] Modeling the effects of impurities on microstructure formation in nanocrystalline nickel thin films [J].

Battaile, CC ;

Hoyt, JJ .

JOM, 2005, 57 (09) :71-73

[9] Texture change of TiN films due to anisotropic incorporation of oxygen [J].

Biro, D. ;

Hasaneen, M. P. ;

Szekely, L. ;

Menyhard, M. ;

Gurban, S. ;

Pekker, P. ;

Dodony, I. ;

Barna, P. B. .

VACUUM, 2014, 103 :78-86

[10] The nanostructure and mechanical properties of nanocomposite Nbx-CoCrCuFeNi thin films [J].

Braeckman, B. R. ;

Misjak, F. ;

Radnoczi, G. ;

Caplovicova, M. ;

Djemia, P. H. ;

Tetard, F. ;

Belliard, L. ;

Depla, D. .

SCRIPTA MATERIALIA, 2017, 139 :155-158

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