共 50 条
- [41] A CMOS potentiostat for control of integrated MEMS actuators 2006 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOLS 1-11, PROCEEDINGS, 2006, : 5555 - 5558
- [42] A MEMS Capacitive Microphone Modelling for Integrated Circuits INTERNATIONAL JOURNAL OF ENGINEERING, 2015, 28 (06): : 888 - 895
- [43] SIGEM, low-temperature deposition of Poly-SiGe MEMs structures on standard CMOS circuits Smart Sensors, Actuators, and MEMS II, 2005, 5836 : 293 - 306
- [45] INTEGRATED CMOS MEMS LIQUID CAPACITIVE INCLINOMETER 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2015, : 1152 - 1155
- [46] Highly-Integrated CMOS Interface Circuits for SiPM-Based PET Imaging Systems 2012 IEEE NUCLEAR SCIENCE SYMPOSIUM AND MEDICAL IMAGING CONFERENCE RECORD (NSS/MIC), 2012, : 3556 - 3559
- [47] Planarization of a CMOS die for an integrated metal MEMS MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY VIII, 2003, 4979 : 137 - 144
- [48] The CMOS/nano interface from a circuits perspective PROCEEDINGS OF THE 2003 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOL IV: DIGITAL SIGNAL PROCESSING-COMPUTER AIDED NETWORK DESIGN-ADVANCED TECHNOLOGY, 2003, : 904 - 907