共 50 条
- [21] Integrated RF MEMS/CMOS Devices DTIP 2008: SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS, 2008, : 374 - 375
- [22] Micromotors unit based on CMOS-MEMS technology integrated on a single chip 2021 18TH INTERNATIONAL CONFERENCE ON ELECTRICAL ENGINEERING, COMPUTING SCIENCE AND AUTOMATIC CONTROL (CCE 2021), 2021,
- [23] Towards high-dynamic range CMOS integrated interface circuits for gas sensors SENSORS AND ACTUATORS B-CHEMICAL, 2013, 179 : 301 - 312
- [24] Foundry-CMOS Integrated Oscillator Circuits Based on Ultra-low Power Ovenized CMOS-MEMS Resonators 2013 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), 2013,
- [25] Test structures for residual stress monitoring in the integrated CMOS-MEMS process development 2016 13TH INTERNATIONAL CONFERENCE ON SYNTHESIS, MODELING, ANALYSIS AND SIMULATION METHODS AND APPLICATIONS TO CIRCUIT DESIGN (SMACD), 2016,
- [29] Paths to Terahertz CMOS Integrated Circuits PROCEEDINGS OF THE IEEE 2009 CUSTOM INTEGRATED CIRCUITS CONFERENCE, 2009, : 657 - +