The Al doping effect on the surface, optical, electrical and nanomechanical properties of the ZnO and AZO thin films prepared by RF sputtering technique

被引：47

作者：

Pat, Suat ^{[1
]}

Mohammadigharehbagh, Reza ^{[1
,2
,3
]}

Ozen, Soner ^{[1
]}

Senay, Volkan ^{[4
]}

Yudar, H. Hakan ^{[1
]}

Korkmaz, Sadan ^{[1
]}

机构：

[1] Eskisehir Osmangazi Univ, Dept Phys, TR-26480 Eskisehir, Turkey

[2] Islamic Azad Univ, Urmia Branch, Dept Phys, Orumiyeh, Iran

[3] Islamic Azad Univ, Urmia Branch, Young Researchers & Elite Club, Orumiyeh, Iran

[4] Bayburt Univ, Primary Sci Educ Dept, TR-69000 Bayburt, Turkey

来源：

VACUUM | 2017年 / 141卷

关键词：

Hardness; Optical properties; AZO; ZnO; DOPED ZNO; MECHANICAL-PROPERTIES; ELASTIC-MODULUS; TEMPERATURE; SUBSTRATE; HARDNESS; INDENTATION; STATE; POWER;

D O I：

10.1016/j.vacuum.2017.04.025

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this study, ZnO and aluminum doped ZnO (AZO) thin films were deposited at constant RF power of 100 W for the determine of the structural, surface, optical, electrical and nanomechanical properties. X -Ray diffraction (XRD), atomic force microscopy (AFM), nanoindentation technique and UV-Vis spectrophotometer were used. ZnO (100) and ZnO (004) orientations were detected in the ZnO and AZO films. The crystallite size values for the films were calculated as to be as 35 nm and 20 nm for ZnO and AZO thin films, respectively. It was found that the roughness values decreased to 3.15 nm from 5.15 nm for AZO and ZnO films, respectively. The hardness values of the ZnO and AZO thin films are measured as 7 GPa and 11 GPa. Young's modulus values were determined as 155 GPa and 95 GPa for ZnO and AZO films, respectively. The ZnO and AZO thin films have high transparency. (C) 2017 Elsevier Ltd. All rights reserved.

引用

页码：210 / 215

页数：6

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