High resolution elastic recoil detection

被引：27
|
作者：
Dollinger, G [1 ]
Bergmaier, A
Goergens, L
Neumaier, P
Vandervorst, W
Jakschik, S
机构：
[1] Tech Univ Munich, Phys Dept E12, D-85748 Garching, Germany
[2] IMEC, Kapeldreef, Belgium
[3] Infineon Technol, Dresden, Germany
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2004年 / 219卷
关键词：
D O I：
10.1016/j.nimb.2004.01.079
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The quantitative analysis of light elements in ultra thin films being thinner than 10 nm is still a nontrivial task. This paper will summarise the prospects of high resolution elastic recoil detection (ERD) using a Q3D magnetic spectrograph. It has been shown that subnanometer resolution can be achieved in ultra thin films and even monolayer resolution is possible close to the surface. ERD has best quantification possibilities compared to any other method. Sensitivity is sufficient to analyse main elements and impurities as e.g. being necessary for the characterisation of microelectronic materials. In addition, high resolution channeling ERD can be performed in order to get information on lattice location of light elements in crystalline ultra thin layers. The potential of high resolution ERD will be demonstrated by several applications where it is the most valuable tool for elemental profiling. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：333 / 343
页数：11
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