Layered SAW gas sensor based on CSA synthesized polyaniline nanofiber on AlN on 64° YX LiNbO3 for H2 sensing

被引：67

作者：

Atashbar, M. Z. ^{[1
]}

Sadek, A. Z. ^{[2
]}

Wlodarski, W. ^{[2
]}

Sriram, S. ^{[2
]}

Bhaskaran, M. ^{[2
]}

Cheng, C. J. ^{[1
]}

Kaner, R. B. ^{[3
,4
]}

Kalantar-zadeh, K. ^{[2
]}

机构：

[1] Western Michigan Univ, Dept Elect & Comp Engn, Kalamazoo, MI 49008 USA

[2] RMIT Univ, Sch Elect & Comp Engn, Melbourne, Vic 3001, Australia

[3] Univ Calif Los Angeles, Dept Chem & Biochem, Los Angeles, CA 90095 USA

[4] Univ Calif Los Angeles, Calif NanoSyst Inst, Los Angeles, CA 90095 USA

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2009年 / 138卷 / 01期

关键词：

Acoustic wave sensors; Aluminium nitride; Polyaniline nanofiber; H-2; sensor; SURFACE-ACOUSTIC-WAVE; FILM; MODES;

D O I：

10.1016/j.snb.2009.01.072

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A 64 degrees YX LiNbO3 Surface acoustic wave (SAW) transducer was fabricated and then aluminium nitride (AlN) layer was deposited on the active area of the device as acoustic wave guiding layer. Structural studies revealed that the deposited AlN thin films have strong preferential c-axis orientation. Morphological analysis showed that the AlN layer is compact with grain dimensions of less than 80 nm. Polyaniline nanofibers were polymerized from the reactions in which an oxidant was rapidly mixed with the aniline monomer in an acidic environment. The polymer was synthesized in camphor sulfonic acid (CSA) to obtain 50 nm average diameter polyaniline nanofibers. These nanofibers were deposited on the layered SAW device and were tested towards hydrogen (H-2) gas while operating at room temperature. The device demonstrated a large and reproducible response to different concentrations of the H-2 gas making it an ideal candidate for H-2 sensing at room temperature. (C) 2009 Elsevier B.V. All rights reserved

引用

页码：85 / 89

页数：5

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