Broadband absorption enhancement of thin SOI photodiode with high-density gold nanoparticles

被引：5
作者：
Ono, Atsushi [1 ]
Enomoto, Yasushi [2 ]
Matsumura, Yasufumi [2 ]
Satoh, Hiroaki [1 ]
Inokawa, Hiroshi [1 ]
机构：
[1] Shizuoka Univ, Elect Res Inst, Naka Ku, Hamamatsu, Shizuoka 4328011, Japan
[2] Nippon Steel & Sumikin Chem Co Ltd, Kisarazu, Chiba 2920835, Japan
来源：
OPTICAL MATERIALS EXPRESS | 2014年 / 4卷 / 04期
基金：
日本学术振兴会;
关键词：
SOLAR-CELLS; ARRAYS; FILMS;
D O I：
10.1364/OME.4.000725
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We demonstrated the quantum efficiency (QE) of silicon-oninsulator (SOI) photodiode was enhanced in visible wavelength region by using gold (Au) nanoparticles. The photons plasmonically scattered by Au nanoparticles couples with the waveguide mode in SOI, and are absorbed efficiently. Optimum size and density of Au nanoparticles have been investigated by 3-D FDTD simulations for sensitivity improvement. The highest enhancement factor of the absorption efficiency in 100-nm-thick SOI is obtained by periodically attaching Au nanoparticles of about 140 nm in diameter and 1.7 x 10(9) particles/ cm(2) in density. Two- fold enhancement in QE was experimentally achieved in visible by the SOI photodiode with randomly arranged Au nanoparticles of the size and density close to the optimized values. (C)2014 Optical Society of America
引用
收藏
页码：725 / 732
页数：8
相关论文
共 26 条
  • [1] Atwater HA, 2010, NAT MATER, V9, P205, DOI [10.1038/nmat2629, 10.1038/NMAT2629]
  • [2] Fabricating planar nanoparticle assemblies with number density gradients
    Bhat, RR
    Fischer, DA
    Genzer, J
    [J]. LANGMUIR, 2002, 18 (15) : 5640 - 5643
  • [3] Catchpole KR, 2008, OPT EXPRESS, V16, P21793, DOI 10.1364/OE.16.021793
  • [4] Colinge J.P., 1997, Silicon-On-Insulator Technology: Materials to VLSI
  • [5] Cristoloveanu S., 1995, ELECT CHARACTERIZATI
  • [6] Kinetic control of interparticle spacing in Au colloid-based surfaces: Rational nanometer-scale architecture
    Grabar, KC
    Smith, PC
    Musick, MD
    Davis, JA
    Walter, DG
    Jackson, MA
    Guthrie, AP
    Natan, MJ
    [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1996, 118 (05) : 1148 - 1153
  • [7] Nanoplasmonics: a frontier of photovoltaic solar cells
    Gu, Min
    Ouyang, Zi
    Jia, Baohua
    Stokes, Nicholas
    Chen, Xi
    Fahim, Narges
    Li, Xiangping
    Ventura, Michael James
    Shi, Zhengrong
    [J]. NANOPHOTONICS, 2012, 1 (3-4) : 235 - 248
  • [8] Surface and volume plasmons in metallic nanospheres in a semiclassical RPA-type approach: Near-field coupling of surface plasmons with the semiconductor substrate
    Jacak, J.
    Krasnyj, J.
    Jacak, W.
    Gonczarek, R.
    Chepok, A.
    Jacak, L.
    [J]. PHYSICAL REVIEW B, 2010, 82 (03)
  • [9] Self-assembled gold nanoparticle/alkanedithiol films:: Preparation, electron microscopy, XPS-analysis, charge transport, and vapor-sensing properties
    Joseph, Y
    Besnard, I
    Rosenberger, M
    Guse, B
    Nothofer, HG
    Wessels, JM
    Wild, U
    Knop-Gericke, A
    Su, DS
    Schlögl, R
    Yasuda, A
    Vossmeyer, T
    [J]. JOURNAL OF PHYSICAL CHEMISTRY B, 2003, 107 (30) : 7406 - 7413
  • [10] Self-organization of large gold nanoparticle arrays
    Kim, B
    Tripp, SL
    Wei, A
    [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2001, 123 (32) : 7955 - 7956
123