Influence of carbon enrichment on electrical conductivity and processing of polycarbosilane derived ceramic for MEMS applications

被引：58

作者：

Dalcanale, Federico ^{[1
,2
]}

Grossenbacher, Jonas ^{[3
]}

Blugan, Gurdial ^{[1
]}

Gullo, Maurizio R. ^{[3
]}

Lauria, Alessandro ^{[2
]}

Brugger, Juergen ^{[3
]}

Tevaearai, Hendrik ^{[4
,5
]}

Graule, Thomas ^{[1
]}

Niederberger, Markus ^{[2
]}

Kuebler, Jakob ^{[1
]}

机构：

[1] Empa, Lab High Performance Ceram, Swiss Fed Labs Mat Sci & Technol, Dubendorf, Switzerland

[2] ETH, Dept Mat, Lab Multifunct Mat, CH-8093 Zurich, Switzerland

[3] Ecole Polytech Fed Lausanne, Microsyst Lab, CH-1015 Lausanne, Switzerland

[4] Univ Hosp Bern, Inselspital Berne, Clin Cardiovasc Surg, CH-3010 Bern, Switzerland

[5] Univ Bern, Bern, Switzerland

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 2014年 / 34卷 / 15期

基金：

瑞士国家科学基金会;

关键词：

Polymer derived ceramics; Polycarbosilane; MEMS; Divinylbenzene; Electrical conductivity; RAMAN-SPECTROSCOPY; CROSS-LINKING; POLYMER; PRECURSOR; FABRICATION; CONVERSION; BEHAVIOR; POLYSILOXANE; PYROLYSIS;

D O I：

10.1016/j.jeurceramsoc.2014.06.002

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

An analysis about the effect of carbon enrichment of allylhydridopolycarbosilane SMP10 (R) with divinylbenzene (DVB) as a promising material for electrical conductive micro-electrical mechanical systems (MEMS) is presented. The liquid precursors can be micropipetted and cured in polytetrafluoroethylene (PTFE) molds to produce 14 mm diameter disc shaped samples. The effect of pyrolysis temperature and carbon content on the electrical conductivity is discussed. The addition of 28.7 wt.% of DVB was found to be the optimum amount. Carbon was preserved in the microstructure during pyrolysis and the ceramic yield increased from 77.5 to 80.5 wt.%. The electrical conductivity increased from 10(-6) to 1 S/cm depending on the annealing temperature. Furthermore, the ceramic samples obtained with this composition were found to be in many cases crack free or with minimal cracks in contrast with the behavior of pure SMP10. Using the same process we demonstrate that also rnicrosized ceramic samples can be produced. (C) 2014 Elsevier Ltd. All rights reserved.

引用

页码：3559 / 3570

页数：12

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