Effect of Pyrolysis Temperature on the Structure and Conduction of Polymer-Derived SiC

被引：36

作者：

Wang, Kewei ^{[1
,2
]}

Ma, Baisheng ^{[1
,2
]}

Li, Xuqin ^{[1
,2
]}

Wang, Yiguang ^{[1
,2
]}

An, Linan ^{[3
]}

机构：

[1] Northwestern Polytech Univ, State Key Lab Solidificat Proc, Xian 710072, Shaanxi, Peoples R China

[2] Northwestern Polytech Univ, Sci & Technol Thermostruct Composite Mat Lab, Xian 710072, Shaanxi, Peoples R China

[3] Univ Cent Florida, Adv Mat Proc & Anal Ctr, Dept Mat Sci & Engn, Orlando, FL 32816 USA

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 2014年 / 97卷 / 07期

关键词：

AMORPHOUS-CARBON; SILICON OXYCARBIDES; CERAMICS; SPECTRA; FILMS; PIEZORESISTIVITY; SPECTROSCOPY; STRESS; SP(3); MEMS;

D O I：

10.1111/jace.12931

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We studied the electric conductivity and structure of polymer-derived carbon-rich amorphous SiC pyrolyzed at different temperatures. The conductivity of the material increased drastically with pyrolysis temperature followed an Arrhenius relationship with the activation energy of similar to 3.4 eV. Raman and X-ray photoelectron spectroscopy analysis revealed that the order of free carbon phase increased with pyrolysis temperature, accompanied by sp(3)-> sp(2) transition. The activation energy for such a structure change was 3.1-3.8 eV, which is close to that for the conductivity change. We thus believe that the increase in the conductivity was mainly due to the increase in conductivity of the free carbon phase.

引用

页码：2135 / 2138

页数：4

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