Fabrication of Embedded Microstructures Via Lamination of Thick Gel-Casted Ceramic Layers

被引：5
作者：
Cheah, Kean How [1 ]
Chin, Jit Kai [1 ]
机构：
[1] Univ Nottingham, Fac Engn, Semenyih 43500, Selangor Darul, Malaysia
来源：
INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY | 2014年 / 11卷 / 02期
关键词：
TEMPERATURE COFIRED CERAMICS; GREEN TAPES; LTCC;
D O I：
10.1111/ijac.12023
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
This article describes a new approach to fabricate various embedded ceramic microstructures. Design geometries of the microstructures are replicated onto a soft reusable polydimethylsiloxane (PDMS) mold. Rapid consolidation of ceramic suspension on the molds using gel-casting technique produces structured ceramic layers. 85% aqueous glycerol solution has been identified as suitable adhesive agent to laminate the ceramic layers. Capability of the approach in fabricating embedded microstructures of 3-dimensional and aspect ratio as high as 20 and 50 has been demonstrated. Ceramic microthruster and Y-shaped microfluidic reactor are fabricated using this new approach to show its potential to construct various ceramic microdevices.
引用
收藏
页码：384 / 393
页数：10
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