Fabrication of Embedded Microstructures Via Lamination of Thick Gel-Casted Ceramic Layers

被引：5

作者：

Cheah, Kean How ^{[1
]}

Chin, Jit Kai ^{[1
]}

机构：

[1] Univ Nottingham, Fac Engn, Semenyih 43500, Selangor Darul, Malaysia

来源：

INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY | 2014年 / 11卷 / 02期

关键词：

TEMPERATURE COFIRED CERAMICS; GREEN TAPES; LTCC;

D O I：

10.1111/ijac.12023

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This article describes a new approach to fabricate various embedded ceramic microstructures. Design geometries of the microstructures are replicated onto a soft reusable polydimethylsiloxane (PDMS) mold. Rapid consolidation of ceramic suspension on the molds using gel-casting technique produces structured ceramic layers. 85% aqueous glycerol solution has been identified as suitable adhesive agent to laminate the ceramic layers. Capability of the approach in fabricating embedded microstructures of 3-dimensional and aspect ratio as high as 20 and 50 has been demonstrated. Ceramic microthruster and Y-shaped microfluidic reactor are fabricated using this new approach to show its potential to construct various ceramic microdevices.

引用

页码：384 / 393

页数：10

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