Measurement range of phase retrieval in optical surface and wavefront metrology

被引:35
作者
Brady, Gregory R. [1 ]
Fienup, James R. [1 ]
机构
[1] Univ Rochester, Inst Opt, Rochester, NY 14627 USA
关键词
RECONSTRUCTION; ALGORITHMS; SYSTEM; IMAGE;
D O I
10.1364/AO.48.000442
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Phase retrieval employs very simple data collection hardware and iterative algorithms to determine the phase of an optical field. We have derived limitations on phase retrieval, as applied to optical surface and wavefront metrology, in terms of the speed of beam (i.e., f-number or numerical aperture) and amount of aberration using arguments based on sampling theory and geometrical optics. These limitations suggest methodologies for expanding these ranges by increasing the complexity of the measurement arrangement, the phase-retrieval algorithm, or both. We have simulated one of these methods where a surface is measured at unusual conjugates. (C) 2009 Optical Society of America
引用
收藏
页码:442 / 449
页数:8
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