Rf magnetron sputtering of polypropylene

被引：25

作者：

Stelmashuk, V

Biederman, H

Slavínská, D

Trchová, M

Hlidek, P

机构：

[1] Charles Univ, Fac Math & Phys, CR-18000 Prague, Czech Republic

[2] Acad Sci Czech Republ, Inst Plasma Phys, Prague 18221 8, Czech Republic

[3] Acad Sci Czech Republ, Inst Macromol Chem, CR-16206 Prague 6, Czech Republic

[4] Charles Univ, Inst Phys, CR-12116 Prague 2, Czech Republic

来源：

VACUUM | 2004年 / 75卷 / 03期

关键词：

polypropylene; sputtering; film structure;

D O I：

10.1016/j.vacuum.2004.02.007

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Radio frequency magnetron sputtering of polypropylene (PP) using argon as a working gas was applied in order to prepare organic films. Changes of the structure and morphology of the PP target and sputtered films have been investigated by infrared spectroscopy, AFM and scanning electron microscopy. It has been shown that the sputtered films are hydrocarbon plasma polymers. The increased incorporation of Off groups into the deposited films was found as a consequence of the PP target history. (C) 2004 Published by Elsevier Ltd.

引用

页码：207 / 215

页数：9

共 32 条

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