Granularity in ion-beam-sputtered TiO2 films

被引：19

作者：

Albertinetti, N

Minden, HT

机构：

[1] Electronics Systems Division-N, Northrop Corporation, Norwood, MA, 02062

[2] Concord, MA, 01742-4011

来源：

APPLIED OPTICS | 1996年 / 35卷 / 28期

关键词：

thin films; defect structures; optical coatings;

D O I：

10.1364/AO.35.005620

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

TiO2-SiO2 multilayer dielectric stacks that were deposited by ion-beam sputtering were found to have a granular structure. The grains were in the TiO2 layers rather than in the SiO2 layers. Their formation was due to the heating of the film during deposition. When the apparatus was modified to reduce the substrate temperature, the granularity was eliminated. (C) 1996 Optical Society of America

引用

页码：5620 / 5625

页数：6

共 18 条

[1] COMPARISON OF THE PROPERTIES OF TITANIUM-DIOXIDE FILMS PREPARED BY VARIOUS TECHNIQUES [J].

BENNETT, JM ;

PELLETIER, E ;

ALBRAND, G ;

BORGOGNO, JP ;

LAZARIDES, B ;

CARNIGLIA, CK ;

SCHMELL, RA ;

ALLEN, TH ;

TUTTLEHART, T ;

GUENTHER, KH ;

SAXER, A .

APPLIED OPTICS, 1989, 28 (16) :3303-3317

[2]

BLAZEY R, 1964, APPL OPTICS, V6, P831

[3] DIFFRACTION AND DIFFUSE-SCATTERING FROM DIELECTRIC MULTILAYERS [J].

ELSON, JM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1979, 69 (01) :48-54

[4] SURFACE OPTICAL COATINGS BY ION ASSISTED DEPOSITION TECHNIQUES - STUDY OF UNIFORMITY [J].

FLORY, F ;

PELLETIER, E ;

ALBRAND, G ;

HU, Y .

APPLIED OPTICS, 1989, 28 (14) :2952-2959

[5] MORPHOLOGY AND LIGHT-SCATTERING OF DIELECTRIC MULTILAYER SYSTEMS [J].

GUENTHER, KH ;

GRUBER, HL ;

PULKER, HK .

THIN SOLID FILMS, 1976, 34 (02) :363-367

[6] MICROSTRUCTURE OF VAPOR-DEPOSITED OPTICAL COATINGS [J].

GUENTHER, KH .

APPLIED OPTICS, 1984, 23 (21) :3806-3816

[7]

GUENTHER KH, 1982, P SOC PHOTO-OPT INST, V346, P9, DOI 10.1117/12.933785

[8]

HERMANN WC, 1982, P SOC PHOTO-OPT INS, V325, P101

[9] SCATTERING STUDY OF SINGLE LAYER TITANIA FILMS [J].

HICKEY, CF ;

AMRA, C ;

PELLETIER, E .

APPLIED OPTICS, 1989, 28 (14) :2754-2761

[10]

Howitt D. G., 1987, Journal of Materials Research, V2, P201, DOI 10.1557/JMR.1987.0201

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