共 50 条
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- [2] Performance and reliability test of MEMS optical scanners RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MEMS/MOEMS VI, 2007, 6463
- [3] Reliability and failure analysis of MEMS/NEMS switches PROCEEDINGS OF THE 2016 IEEE 23RD INTERNATIONAL SYMPOSIUM ON THE PHYSICAL AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS (IPFA), 2016, : 408 - 413
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- [6] Instrumentation and methodology for MEMS testing, reliability assessment and failure analysis 2004 24TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS, PROCEEDINGS, VOLS 1 AND 2, 2004, : 57 - 63
- [7] System Reliability Analysis of MEMS Gyroscope with Multiple Failure Modes PROCEEDINGS OF 2018 10TH INTERNATIONAL CONFERENCE ON MODELLING, IDENTIFICATION AND CONTROL (ICMIC), 2018,
- [9] Optical MEMS: Designing for reliability RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MEMS/MOEMS VI, 2007, 6463