CVD diamond metallization and characterization

被引：3
作者：
Fraimovitch, D. [1 ]
Adelberd, A. [1 ]
Marunko, S. [1 ]
Lefeuvre, G. [2 ]
Ruzin, A. [1 ]
机构：
[1] Tel Aviv Univ, Fac Engn, IL-69978 Tel Aviv, Israel
[2] Micron Semicond Ltd, Royal Bldg,Marlborough Rd, Lancing Business Pk BN15 8SJ, England
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2017年 / 845卷
关键词：
CVD; Diamond; Radiation; Detector; AFM; Activation; DETECTORS;
D O I：
10.1016/j.nima.2016.06.097
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
In this study we compared three diamond substrate grades: polycrystalline, optical grade single crystal, and electronic grade single crystal for detector application. Beside the bulk type, the choice of contact material, pre-treatment, and sputtering process details have shown to alter significantly the diamond detector performance. Characterization of diamond substrate permittivity and losses indicate grade and crystallinity related, characteristic differences for frequencies in 1 kHz-1 MHz range. Substantial grade related variations were also observed in surface electrostatic characterization performed by contact potential difference (CPD) mode of an atomic force microscope. Study of conductivity variations with temperature reveal that bulk trap energy levels are also dependent on the crystal grade. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码：76 / 79
页数：4
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