Self-aligned organic field-effect transistors using back-surface exposure method

被引:26
作者
Hyodo, T [1 ]
Morita, F [1 ]
Naka, S [1 ]
Okada, H [1 ]
Onnagawa, H [1 ]
机构
[1] Toyama Univ, Fac Engn, Toyama 9308555, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2004年 / 43卷 / 4B期
关键词
organic FET; pentacene; self-alignment;
D O I
10.1143/JJAP.43.2323
中图分类号
O59 [应用物理学];
学科分类号
摘要
Self-aligned organic field-effect transistors using the back-surface exposure method were investigated. Using the back-surface exposure method. source and drain electrodes were self-aligned to the gate electrode. The overlapping length of the gate-source and the gate-drain electrodes was as small as 0.8 mum. Excellent field-effect operation was obtained with small parasitic resistance, where the maximum field-effect mobility was 0.12 cm(2)/Vs. The on-off ratio was 10(4), threshold voltage was -1.0 V, mutual conductance was 1.8 mS and subthreshold slope was 0.5 V/decade. Combined with capacitance measurement, the estimated cutoff frequency was 0.18 MHz.
引用
收藏
页码:2323 / 2325
页数:3
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