Modelling of an intermediate pressure microwave oxygen discharge reactor: from stationary two-dimensional to time-dependent global (volume-averaged) plasma models

被引：14

作者：

Kemaneci, Efe ^{[1
,2
]}

Carbone, Emile ^{[3
]}

Jimenez-Diaz, Manuel ^{[4
]}

Graef, Wouter ^{[1
]}

Rahimi, Sara ^{[1
]}

van Dijk, Jan ^{[1
]}

Kroesen, Gerrit ^{[1
]}

机构：

[1] Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands

[2] Ruhr Univ Bochum, Inst Theoret Elect Engn, Dept Elect Engn & Informat Technol, D-44780 Bochum, Germany

[3] Univ Grenoble Alpes, CNRS, CEA Leti Minatec, LTM, F-38054 Grenoble, France

[4] Univ Toulouse 3, CNRS, INPT, F-31062 Toulouse, France

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2015年 / 48卷 / 43期

关键词：

microwave-induced plasma modelling; computational plasma physics; global (volume-averaged) model; DISSOCIATIVE ELECTRON-ATTACHMENT; EXCITATION CROSS-SECTIONS; AMBIPOLAR DIFFUSION; METASTABLE OXYGEN; NEGATIVE-IONS; IMPACT DETACHMENT; RATE-CONSTANT; SURFACE; O-2; DEPOSITION;

D O I：

10.1088/0022-3727/48/43/435203

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A microwave-induced oxygen plasma is simulated using both stationary and time-resolved modelling strategies. The stationary model is spatially resolved and it is self-consistently coupled to the microwaves (Jimenez-Diaz et al 2012 J. Phys. D: Appl. Phys. 45 335204), whereas the time-resolved description is based on a global (volume-averaged) model (Kemaneci et al 2014 Plasma Sources Sci. Technol. 23 045002). We observe agreement of the global model data with several published measurements of microwave-induced oxygen plasmas in both continuous and modulated power inputs. Properties of the microwave plasma reactor are investigated and corresponding simulation data based on two distinct models shows agreement on the common parameters. The role of the square wave modulated power input is also investigated within the time-resolved description.

引用

页数：21

共 114 条

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