A versatile microreactor platform featuring a chemical-resistant microvalve array for addressable multiplex syntheses and assays

A versatile microreactor platform featuring a novel chemical-resistant microvalve array has been developed using combined silicon/polymer micromachining and a special polymer membrane transfer process. The basic valve unit in the array has a typical 'transistor' structure and a PDMS/parylene double-layer valve membrane. A robust multiplexing algorithm is also proposed for individual addressing of a large array using a minimal number of signal inputs. The in-channel microvalve is leakproof upon pneumatic actuation. In open status it introduces small impedance to the fluidic flow, and allows a significantly larger dynamic range of flow rates (similar to ml min(-1)) compared with most of the microvalves reported. Equivalent electronic circuits were established by modeling the microvalves as PMOS transistors and the fluidic channels as simple resistors to provide theoretical prediction of the device fluidic behavior. The presented microvalve/reactor array showed excellent chemical compatibility in the tests with several typical aggressive chemicals including those seriously degrading PDMS-based microfluidic devices. Combined with the multiplexing strategy, this versatile array platform can find a variety of lab-on-a-chip applications such as addressable multiplex biochemical synthesis/assays, and is particularly suitable for those requiring tough chemicals, large flow rates and/or high-throughput parallel processing. As an example, the device performance was examined through the addressed synthesis of 30-mer DNA oligonucleotides followed by sequence validation using on-chip hybridization. The results showed leakage-free valve array addressing and proper synthesis in target reactors, as well as uniform flow distribution and excellent regional reaction selectivity.