Enhancement on Crystallinity Property of Low Annealed PbTiO3 Thin Films for Metal-insulator-metal Capacitor

被引：0

作者：

Nurbaya, Z. ^{[1
,4
]}

Wahid, M. H. ^{[3
]}

Rozana, M. D. ^{[3
]}

Alrokayan, S. A. H. ^{[5
]}

Khan, H. A. ^{[5
]}

Rusop, M. ^{[1
,2
]}

机构：

[1] Univ Teknol Mara UiTM, NANO Elect Ctr, Fac Elect Engn, Shah Alam 40450, Selangor, Malaysia

[2] Univ Teknol Mara UiTM, NANO SciTech Ctr, Inst Sci, Shah Alam 40450, Selangor, Malaysia

[3] Univ Teknol Mara UiTM, Fac Appl Sci, Dept Polymer, Shah Alam 40450, Selangor, Malaysia

[4] UTM, UTM Razak Sch Engn & Adv Technol, Kuala Lumpur 54100, Malaysia

[5] King Saud Univ, Res Chair Biomed Applicat Nanomat, Dept Biochem, Coll Sci, Riyadh 11451, Saudi Arabia

来源：

8TH INTERNATIONAL CONFERENCE ON NANOSCIENCE AND NANOTECHNOLOGY 2017 (NANO-SCITECH 2017) | 2018年 / 1963卷

关键词：

SOL-GEL; ELECTRICAL-PROPERTIES; LEAD; DEPOSITION;

D O I：

10.1063/1.5036872

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This study presents the investigation on crystallinity property of PbTiO3 thin films towards metal-insulator-metal capacitor device fabrication. The preparation of the thin films utilizes sol-gel spin coating method with low annealing temperature effect. Hence, structural and electrical characterization is brought to justify the thin films consistency.

引用

页数：4

共 13 条

[1] Influence of the lead source materials on the microstructure and ferroelectric properties of PZT films sputter-deposited using lead and lead oxide [J].

Chang, WL ;

He, JL .

JOURNAL OF ELECTROCERAMICS, 2004, 13 (1-3) :35-39

[2] Characterization of lead lanthanum titanate thin films grown on fused quartz using MOCVD [J].

Chen, HY ;

Lin, J ;

Tan, KL ;

Feng, ZC .

THIN SOLID FILMS, 1996, 289 (1-2) :59-64

[3] Atomic layer deposition and post-deposition annealing of PbTiO3 thin films [J].

Harjuoja, J ;

Kosola, A ;

Putkonen, M ;

Niinistö, L .

THIN SOLID FILMS, 2006, 496 (02) :346-352

[4] Deposition of PbTiO3 tilms on Pt/Si substrates using pulsed laser deposition [J].

Khan, Mikael A. ;

Comyn, Timothy P. ;

Bell, Andrew J. .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2008, 28 (03) :591-597

[5]

Kim B.-H., 2006, J CERAM, V606, P603

[6]

Moon J, 1997, J AM CERAM SOC, V80, P2613, DOI 10.1111/j.1151-2916.1997.tb03164.x

[7] Electrical properties of PZT thin films grown by sol-gel and PLD using a seed layer [J].

Pandey, SK ;

James, AR ;

Prakash, C ;

Goel, TC ;

Zimik, K .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2004, 112 (01) :96-100

[8] Controlling crystallinity and crystal orientation of PbTiO3 and Pb(Zr, Ti)O3 thin films by introducing different seed layers [J].

Shinozaki, K ;

Yokomura, N ;

Ito, T ;

Kiguchi, T ;

Wakiya, N ;

Mizutani, N .

JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 2002, 110 (05) :362-367

[9] Preparation of lead titanate ultrathin film using Langmuir-Blodgett film as precursor [J].

Sugai, H ;

Iijima, T ;

Masumoto, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (9B) :5322-5325

[10] Effect of dispersed Ag on the dielectric properties of sol-gel derived PbTiO3 thin films on ITO/glass substrate [J].

Tang, LW ;

Du, PY ;

Han, GR ;

Weng, WJ ;

Zhao, GL ;

Shen, G .

SURFACE & COATINGS TECHNOLOGY, 2003, 167 (2-3) :177-180

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