Hybrid optical measurement system for evaluation of precision two-dimensional planar stages

被引：7
|
作者：
Kim, Jong-Ahn [1 ]
Lee, Jae Yong [1 ]
Kang, Chu-Shik [1 ,2 ]
Woo, Jae Heun [1 ]
机构：
[1] Korea Res Inst Stand & Sci, Div Phys Metrol, Length Grp, 267 Gajeong Ro, Daejeon 34113, South Korea
[2] Korea Univ Sci & Technol, Dept Sci Measurement, 217 Gajeong Ro, Daejeon 34113, South Korea
来源：
MEASUREMENT | 2022年 / 194卷
关键词：
Straightness; Angular motion; Angle sensor; Profile interferometer; Stage evaluation; ANGULAR ERRORS; STRAIGHTNESS;
D O I：
10.1016/j.measurement.2022.111023
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper presents an optical measurement system, which is mainly composed of two hybrid sensor modules (HSMs), for evaluation of precision two-dimensional (2D) planar stages. The HSM is designed to integrate two different types of sensors within a single sensor module, so that it can be operated as a profile interferometer or an angle sensor by simply switching the data-processing mode. This enables us to implement efficient on-site evaluation of straightness errors of moving mirrors of a two-axis laser interferometer, and multi-axis parasitic motion errors of a 2D planar stage without reconfiguration of the evaluation setup. To estimate the performance of a prototype measurement system, an exemplary 2D stage was experimentally evaluated, and the straightness and angular motion errors were measured with expanded uncertainty (k = 2) of 40 nm and 0.14", respectively. Reliability of the measurement system was also verified by comparison with reference instruments.
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收藏
页数：8
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