Towards Integrated Mid-Infrared Gas Sensors

被引：202
|
作者：
Popa, Daniel [1 ]
Udrea, Florin [1 ,2 ]
机构：
[1] Univ Cambridge, Dept Engn, Cambridge CB3 0FA, England
[2] Ams Sensors UK Ltd, Cambridge CB4 0DL, England
来源：
SENSORS | 2019年 / 19卷 / 09期
关键词：
gas sensors; mid-infrared; integrated sensors; MEMS; CMOS; SPECTROSCOPY;
D O I：
10.3390/s19092076
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Optical gas sensors play an increasingly important role in many applications. Sensing techniques based on mid-infrared absorption spectroscopy offer excellent stability, selectivity and sensitivity, for numerous possibilities expected for sensors integrated into mobile and wearable devices. Here we review recent progress towards the miniaturization and integration of optical gas sensors, with a focus on low-cost and low-power consumption devices.
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收藏
页数：15
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