A SIMULATION-BASED FRAMEWORK FOR INDUSTRIAL AUTOMATED WET-ETCH STATION SCHEDULING PROBLEMS IN THE SEMICONDUCTOR INDUSTRY

被引：0

作者：

Aguirre, Adrian M. ^{[1
]}

Cafaro, Vanina G. ^{[1
]}

Mendez, Carlos A. ^{[1
]}

Castro, Pedro M. ^{[2
]}

机构：

[1] Univ Nacl Litoral, CONICET, INTEC, RA-3000 Santa Fe, Argentina

[2] UMOSE, Lab Nacl Energia & Geol, P-1649038 Lisbon, Portugal

来源：

23RD EUROPEAN MODELING & SIMULATION SYMPOSIUM, EMSS 2011 | 2011年

关键词：

Discrete-event simulation; Semiconductor Manufacturing System (SMS); Automated Wet-Etch Station (AWS); Arena Software;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This work presents the development and application of an advanced modelling, simulation and optimization-based framework to the efficient operation of the Automated Wet-etch Station (AWS), a critical stage in Semiconductor Manufacturing Systems (SMS). Lying on the main concepts of the process-interaction approach, principal components and tools available in the Arena simulation software were used to achieve the best representation of this complex and highly-constrained manufacturing system. Furthermore, advanced Arena templates were utilized for modelling very specific operation features arising in the process under study. The major aim of this work is to provide a novel computer-aided tool to systematically improve the dynamic operation of this critical manufacturing station by quickly generating efficient schedules for the shared processing and transportation devices.

引用

页码：384 / 393

页数：10

共 8 条

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