[INVITED] Ultrafast laser micro- and nano-processing with nondiffracting and curved beams

被引：84

作者：

Courvoisier, F. ^{[1
]}

Stoian, R. ^{[2
]}

Couairon, A. ^{[3
]}

机构：

[1] Univ Bourgnogne Franche Comte, CNRS, UMR 6174, Inst FEMTO ST, Besancon, France

[2] Univ St Etienne, Univ Lyon, CNRS, Lab Hubert Curien,UMR 5516, F-42000 St Etienne, France

[3] Ecole Polytech, Ctr Phys Theor, CNRS, F-91128 Palaiseau, France

来源：

OPTICS AND LASER TECHNOLOGY | 2016年 / 80卷

关键词：

Nondiffracting beams; Bessel beams; Accelerating beams; Ultrafast laser materials processing; BESSEL BEAMS; FUSED-SILICA; FEMTOSECOND FILAMENTATION; TRANSPARENT MATERIALS; SELF-RECONSTRUCTION; PLASMA CHANNELS; GAUSSIAN BEAMS; FINITE-ENERGY; WAVE ANALYSIS; VORTEX BEAMS;

D O I：

10.1016/j.optlastec.2015.11.026

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Ultrafast laser materials processing has undergone an important change with the development of non diffracting beams. These beams enable overcoming many of the difficulties usually encountered with standard Gaussian-beam focusing in materials. We review the techniques of non-diffracting and accelerating beam shaping that generates lines, tubes or curved segments of focused light on distances that exceed the Gaussian Rayleigh range by several orders of magnitude. We review the benefits and applications of nondiffracting beams for laser micro- and nano-processing in the general context of materials processing with ultrashort pulses in the filamentation regime. We highlight applications on ultra-high aspect ratio nano-drilling and direct laser processing along curves. (C) 2015 Elsevier Ltd. All rights reserved.

引用

页码：125 / 137

页数：13

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