Simulation-Based 'Smart' Operation Management System for Semiconductor Manufacturing

被引：1

作者：

Choi, Byoung K. ^{[1
]}

Kim, Byung H. ^{[2
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Ind & Syst Engn, Daejeon, South Korea

[2] VMS Solut Co Ltd, Daejeon, South Korea

来源：

ADVANCES IN PRODUCTION MANAGEMENT SYSTEMS: INNOVATIVE PRODUCTION MANAGEMENT TOWARDS SUSTAINABLE GROWTH (AMPS 2015), PT II | 2015年 / 460卷

关键词：

Simulation-based operation management system; Online simulation; Lot pegging; Fab scheduling;

D O I：

10.1007/978-3-319-22759-7_10

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Presented in this paper is a framework of a simulation-based 'smart' operation management system (OMS) for semiconductor manufacturing. Also described are changes in the semiconductor market environment and key modules in the smart OMS. The proposed smart OMS is being implemented for a couple of IC chip makers in Korea.

引用

页码：82 / 89

页数：8

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