Sub-micron silica diaphragm-based fiber-tip Fabry-Perot interferometer for pressure measurement

被引：207

作者：

Liao, Changrui ^{[1
]}

Liu, Shen ^{[1
]}

Xu, Lei ^{[2
]}

Wang, Chao ^{[1
,3
]}

Wang, Yiping ^{[1
]}

Li, Zhengyong ^{[1
]}

Wang, Qiao ^{[1
]}

Wang, D. N. ^{[3
]}

机构：

[1] Shenzhen Univ, Coll Optoelect Engn, Minist Educ & Guangdong Prov, Key Lab Optoelect Devices & Syst, Shenzhen 518060, Peoples R China

[2] Hong Kong Polytech Univ, Dept Comp, Hong Kong, Hong Kong, Peoples R China

[3] Hong Kong Polytech Univ, Dept Elect Engn, Hong Kong, Hong Kong, Peoples R China

来源：

OPTICS LETTERS | 2014年 / 39卷 / 10期

基金：

美国国家科学基金会; 中国国家自然科学基金;

关键词：

SENSOR; CAVITY;

D O I：

10.1364/OL.39.002827

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate a sub-micron silica diaphragm-based fiber-tip Fabry-Perot interferometer for pressure sensing applications. The thinnest silica diaphragm, with a thickness of similar to 320 nm, has been achieved by use of an improved electrical arc discharge technique. Such a sub-micron silica diaphragm breaks the sensitivity limitation imposed by traditional all-silica Fabry-Perot interferometric pressure sensors and, as a result, a high pressure sensitivity of similar to 1036 pm/MPa at 1550 nm and a low temperature cross-sensitivity of similar to 960 Pa/degrees C are achieved when a silica diaphragm of similar to 500 nm in thickness is used. Moreover, the all-silica spherical structure enhanced the mechanical strength of the micro-cavity sensor, making it suitable for high sensitivity pressure sensing in harsh environments. (C) 2014 Optical Society of America

引用

页码：2827 / 2830

页数：4

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