Evolution of microstructure and related optical properties of ZnO grown by atomic layer deposition

被引：96

作者：

Abou Chaaya, Adib ^{[1
]}

Viter, Roman ^{[2
,3
,4
]}

Bechelany, Mikhael ^{[1
]}

Alute, Zanda ^{[2
]}

Erts, Donats ^{[4
]}

Zalesskaya, Anastasiya ^{[2
]}

Kovalevskis, Kristaps ^{[3
,4
]}

Rouessac, Vincent ^{[1
]}

Smyntyna, Valentyn ^{[2
]}

Miele, Philippe ^{[1
]}

机构：

[1] Univ Montpellier 2, IEM, ENSCM CNRS UM2, UMR 5635, F-34095 Montpellier, France

[2] Odessa Natl II Mechnikov Univ, Fac Phys, UA-65026 Odessa, Ukraine

[3] Latvian State Univ, Inst Atom Phys & Spect, LV-1586 Riga, Latvia

[4] Latvian State Univ, Inst Chem Phys, LV-1586 Riga, Latvia

来源：

BEILSTEIN JOURNAL OF NANOTECHNOLOGY | 2013年 / 4卷

关键词：

atomic layer deposition; optical properties; photoluminescence; thin films; ZnO; URCHIN-LIKE ZNO; THIN-FILMS; ELECTRICAL-PROPERTIES; ZINC-OXIDE; SURFACE-MORPHOLOGY; SOLAR-CELLS; PHOTOLUMINESCENCE; LUMINESCENCE; SUBSTRATE; NANOSTRUCTURES;

D O I：

10.3762/bjnano.4.78

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A study of transmittance and photoluminescence spectra on the growth of oxygen-rich ultra-thin ZnO films prepared by atomic layer deposition is reported. The structural transition from an amorphous to a polycrystalline state is observed upon increasing the thickness. The unusual behavior of the energy gap with thickness reflected by optical properties is attributed to the improvement of the crystalline structure resulting from a decreasing concentration of point defects at the growth of grains. The spectra of UV and visible photoluminescence emissions correspond to transitions near the band-edge and defect-related transitions. Additional emissions were observed from band-tail states near the edge. A high oxygen ratio and variable optical properties could be attractive for an application of atomic layer deposition (ALD) deposited ultrathin ZnO films in optical sensors and biosensors.

引用

页码：690 / 698

页数：9

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