Liquid-jet target for laser-plasma soft x-ray generation

被引：57

作者：

Malmqvist, L

Rymell, L

Berglund, M

Hertz, HM

机构：

[1] Department of Physics, Lund Institute of Technology, S-221 00 Lund

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1996年 / 67卷 / 12期

关键词：

D O I：

10.1063/1.1147561

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We describe a new liquid-target system for low-debris laser-plasma soft x-ray sources. The system is based on a microscopic liquid jet and is experimentally evaluated for 0.7-1 keV proximity lithography and water-window x-ray microscopy applications. Compared to an existing liquid-droplet target, this target system has the same low debris emission, high x-ray photon flux, and narrow spectral bandwidth. The advantages of the liquid-jet target include improved x-ray flux stability, increased range of suitable target liquids, and elimination of the need for temporal synchronization, thereby allowing less complex laser systems to be used. (C) 1996 American Institute of Physics.

引用

页码：4150 / 4153

页数：4

共 13 条

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