Computationally efficient dynamic modeling of MEMS

被引：0

作者：

Popa, DO ^{[1
]}

Critchley, J ^{[1
]}

Sadowski, M ^{[1
]}

Anderson, KS ^{[1
]}

Skidmore, G ^{[1
]}

机构：

[1] Rensselaer Polytech Inst, Ctr Automat Technol, Troy, NY 12180 USA

来源：

NSTI NANOTECH 2004, VOL 2, TECHNICAL PROCEEDINGS | 2004年

关键词：

MEMS modeling and simulation; compact modeling; O(N) simulation;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Traditional modeling work in MEMS includes simplified PDE/ODE formulation, based on physical principles, and Finite Element Analysis. More recently, reduced order modeling techniques using Krylov subspace decomposition have been proposed in the context of nodal analysis. This modeling technique makes it possible to predict the dynamic behavior of more complex MEMS, but the computational engine is still a traditional cubic order solver. In this paper we apply a new modeling approach for complex MEMS based on a linear O(n+m) (n- number of bodies, in - number of constraints) solver for rigid multibody dynamics. As direct applications, we present simulation and experimental results of models for thermally driven MEMS actuators, compared against established simulation tools, namely FEA (Intellisuite), AUTOLEV, and SUGAR 3.0.

引用

页码：311 / 314

页数：4