Two-photon-absorbed photopolymerization for three-dimensional microfabrication

被引：21
|
作者：
Maruo, S
Kawata, S
机构：
来源：
MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS | 1997年
关键词：
D O I：
10.1109/MEMSYS.1997.581794
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
We report a method for three-dimensional microfabrication with photopolymerization stimulated by two-photon absorption. An experimental system for the microfabrication has been developed with a Ti:sapphire laser that has an oscillating wavelength as 770 nm and a 130 fs pulse width. The usefulness of the proposed method has been verified by fabrication of several kinds of microstructure by use of a resin consisting of photoinitiators, urethane acrylate monomers and urethane acrylate oligomers.
引用
收藏
页码：169 / 174
页数：6
相关论文
共 50 条
  • [11] Three-dimensional metal microfabrication technique by using two-photon reduction
    Takeyasu, Nobuyuki
    Tanaka, Takuo
    Kawata, Satoshi
    2007 PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, VOLS 1-4, 2007, : 1073 - 1074
  • [12] Optically driven micropump produced by three-dimensional two-photon microfabrication
    Maruo, Shoji
    Inoue, Hiroyuki
    APPLIED PHYSICS LETTERS, 2006, 89 (14)
  • [13] Three-dimensional structure formed by holographic two-photon microfabrication of photoresist
    Takahashi, Hidetomo
    Hayasaki, Yoshio
    2007 PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, VOLS 1-4, 2007, : 1336 - 1337
  • [14] Two-photon polymerization for three-dimensional sub-microfabrication by dendrimers
    Yokoyama, S
    Mashiko, S
    KOBUNSHI RONBUNSHU, 2002, 59 (10) : 642 - 645
  • [15] Chemically amplified positive resists for two-photon three-dimensional microfabrication
    Yu, TY
    Ober, CK
    Kuebler, SM
    Zhou, WH
    Marder, SR
    Perry, JW
    ADVANCED MATERIALS, 2003, 15 (06) : 517 - 521
  • [16] Synthesis and Properties of a New Two-photon-absorbed Material DMAEAS
    延云兴
    于晓强
    王东
    赵显
    方奇
    蒋民华
    Chinese Journal of Chemistry, 2003, (02) : 130 - 132
  • [17] Synthesis and properties of a new two-photon-absorbed material HEASPS
    Chun, W
    Yan, R
    Shao, ZS
    Xian, Z
    Zhou, GY
    Wang, DFQ
    Jiang, MH
    PHYSICS AND CHEMISTRY OF LIQUIDS, 2001, 39 (04) : 507 - 519
  • [18] Manipulation and assembly of three-dimensional microparts produced by two-photon photopolymerization
    Kim, Jung-Dae
    Hwang, Sun-Uk
    Shin, Hyun-Geun
    Lee, Yong-Gu
    OPTICAL TRAPPING AND OPTICAL MICROMANIPULATION VII, 2010, 7762
  • [19] Synthesis and properties of a new two-photon-absorbed material DMAEAS
    Yan, YX
    Yu, XQ
    Wang, D
    Zhao, X
    Fang, Q
    Jiang, MH
    CHINESE JOURNAL OF CHEMISTRY, 2003, 21 (02) : 130 - 132
  • [20] A two-photon femtosecond laser system for three-dimensional microfabrication and data storage
    Jiang, ZW
    Zhou, YJ
    Yuan, DJ
    Huang, WH
    Xia, AD
    CHINESE PHYSICS LETTERS, 2003, 20 (12) : 2126 - 2129
12345