Two-photon-absorbed photopolymerization for three-dimensional microfabrication

被引：21
|
作者：
Maruo, S
Kawata, S
机构：
来源：
MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS | 1997年
关键词：
D O I：
10.1109/MEMSYS.1997.581794
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
We report a method for three-dimensional microfabrication with photopolymerization stimulated by two-photon absorption. An experimental system for the microfabrication has been developed with a Ti:sapphire laser that has an oscillating wavelength as 770 nm and a 130 fs pulse width. The usefulness of the proposed method has been verified by fabrication of several kinds of microstructure by use of a resin consisting of photoinitiators, urethane acrylate monomers and urethane acrylate oligomers.
引用
收藏
页码：169 / 174
页数：6
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