Study on the effect of heat treatment conditions on metalorganic-chemical-vapor-deposited ferroelectric Hf0.5Zr0.5O2 thin film on Ir electrode

被引：68
作者：
Shimizu, Takao [1 ]
Yokouchi, Tatsuhiko [2 ]
Shiraishi, Takahisa [2 ]
Oikawa, Takahiro [2 ]
Krishnan, P. S. Sankara Rama [2 ]
Funakubo, Hioshi [1 ,2 ]
机构：
[1] Tokyo Inst Technol, Mat Res Ctr Element Strategy, Yokohama, Kanagawa 2268503, Japan
[2] Tokyo Inst Technol, Dept Innovat & Engn Mat, Yokohama, Kanagawa 2268502, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2014年 / 53卷 / 09期
基金：
奥地利科学基金会;
关键词：
PHASE-EQUILIBRIA; MEMORY DEVICES; SYSTEM; HAFNIA;
D O I：
10.7567/JJAP.53.09PA04
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The effect of the heat treatment conditions on the constituent phases and electrical properties of (Hf(0.5)Z(0.5))O-2 films deposited by the metalorganic chemical vapor deposition was investigated. By using a low temperature or short duration for post-heat treatment after the deposition, the volume fraction of the tetragonal phase increases, resulting in a high dielectric constant. On the other hand, the volume fraction of the monoclinic phase increased in the films that were heat-treated at higher temperatures and exposed to longer heat treatment duration. The ferroelectric with and dielectric properties of these films were greatly inferior. Superior ferroelectric properties a significant volume fraction of orthorhombic phase were achieved for intermediate heat treatment conditions. These results give useful information to understand the origin of the ferroelectricity and to control the phases and electrical properties in HfO2-based films. (C) 2014 The Japan Society of Applied Physics
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页数：6
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