Inverse determination of the cutting force on nanoscale processing using atomic force microscopy

被引:46
作者
Chang, WJ [1 ]
Fang, TH
Weng, CI
机构
[1] Kun Shan Univ Technol, Dept Mech Engn, Tainan 710, Taiwan
[2] So Taiwan Univ Technol, Dept Mech Engn, Tainan 710, Taiwan
[3] Natl Cheng Kung Univ, Dept Mech Engn, Tainan 710, Taiwan
关键词
D O I
10.1088/0957-4484/15/5/004
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
This study presents a means of calculating the cutting force during the nanomachining process using an atomic force microscope (AFM) cantilever. The determination of the cutting force in the machining system is regarded as an inverse vibration problem. The conjugate gradient method is applied to treat the inverse problem using available displacement measurements. Numerical results show that the method can accurately estimate the cutting force even for problems with error of displacement measurement. Furthermore, the initial guesses for the cutting force can be arbitrarily chosen and the computing time required for the inverse calculations takes less than one second using a Pentium III-450 MHz PC.
引用
收藏
页码:427 / 430
页数:4
相关论文
共 24 条
[1]  
Alifanov O. M., 1994, INVERSE HEAT TRANSFE
[2]   Basic properties of dynamic force spectroscopy with the scanning force microscope in experiment and simulation [J].
Anczykowski, B ;
Kruger, D ;
Babcock, KL ;
Fuchs, H .
ULTRAMICROSCOPY, 1996, 66 (3-4) :251-259
[3]  
Bhushan B., 1999, HDB MICRONANOTRIBOLO, V2nd
[4]   ATOMIC FORCE MICROSCOPE [J].
BINNIG, G ;
QUATE, CF ;
GERBER, C .
PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933
[5]  
Chana R, 2002, OSTEOPOROSIS INT, V13, pS2
[6]   Inverse problem of coupled heat and moisture transport for prediction of moisture distributions in an annular cylinder [J].
Chang, WJ ;
Weng, CI .
INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, 1999, 42 (14) :2661-2672
[7]   Two-dimensional inverse problem in estimating heat flux of pin fins [J].
Chen, UC ;
Chang, WJ ;
Hsu, JC .
INTERNATIONAL COMMUNICATIONS IN HEAT AND MASS TRANSFER, 2001, 28 (06) :793-801
[8]  
Dürig U, 2000, APPL PHYS LETT, V76, P1203, DOI 10.1063/1.125983
[9]   Machining characterization of the nano-lithography process using atomic force microscopy [J].
Fang, TH ;
Weng, CI ;
Chang, JG .
NANOTECHNOLOGY, 2000, 11 (03) :181-187
[10]   Effects of AFM-based nanomachining process on aluminum surface [J].
Fang, TH ;
Chang, WJ .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2003, 64 (06) :913-918