Boron induced c-axis growth and ammonia sensing signatures of spray pyrolysis deposited ZnO thin films - Relation between crystallinity and sensing

被引：10

作者：

Shankar, Prabakaran ^{[1
]}

Srinivasan, Parthasarathy ^{[2
,5
]}

Vutukuri, Brahmaiah ^{[2
,5
]}

Kulandaisamy, Arockia Jayalatha ^{[5
]}

Mani, Ganesh Kumar ^{[3
]}

Babu, K. Jayanth ^{[2
,5
]}

Lee, Jung Heon ^{[1
,4
]}

Rayappan, John Bosco Balaguru ^{[2
,5
]}

机构：

[1] Sungkyunkwan Univ SKKU, Sch Adv Mat Sci & Engn, Suwon 16419, South Korea

[2] SASTRA Deemed Univ, Ctr Nanotechnol & Adv Biomat CeNTAB, Thanjavur 613401, Tamil Nadu, India

[3] Tokai Univ, Micro Nano Technol Ctr, Hiratsuka, Kanagawa 2591292, Japan

[4] Sungkyunkwan Univ SKKU, SKKU Adv Inst Nanotechnol SAINT, Biomed Inst Convergence SKKU BICS, Inst Quantum Biophys IQB,Res Ctr Adv Mat Tech, Suwon 16419, South Korea

[5] SASTRA Deemed Univ, Sch Elect Elect Engn SEEE, Thanjavur 613401, Tamil Nadu, India

来源：

THIN SOLID FILMS | 2022年 / 746卷

基金：

新加坡国家研究基金会;

关键词：

Ammonia sensor; Boron doped ZnO; Spray pyrolysis; Tensile stress; Band gap; ZINC-OXIDE FILMS; ELECTRICAL-PROPERTIES; OPTICAL-PROPERTIES; NANOSTRUCTURES; SUBSTRATE; SENSOR;

D O I：

10.1016/j.tsf.2022.139126

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Boron (B) doping in zinc oxide (ZnO) using spray pyrolysis has always led to deterioration of host crystal structure. Unlikely, here, we report the optimized spray pyrolysis deposition parameters for the development of c-axis oriented boron-doped ZnO thin films. As the B concentration increases from 2 to 10 mol%, the hexagonal crystal structure exhibited a highly oriented (002) plane with an increased texture co-efficient. In particular, 2 mol% B dopants promoted the growth of the (101) and (100) planes and increased the crystallite size. Tensile stress in the c-axis plane of 10 mol% B-doped ZnO films leads to the red shift in the band gap (from wide to narrow). Furthermore, 10 mol% B dopants resulted in the enhanced ammonia sensing performance at room temperature. The sensing performance of all the deposited B-doped ZnO films revealed that influence of enhanced planes of host structure energetically favoured the ammonia adsorption.

引用

页数：7

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