Operation of nanomechanical resonant structures in air

被引：35

作者：

Sekaric, L ^{[1
]}

Zalalutdinov, M ^{[1
]}

Bhiladvala, RB ^{[1
]}

Zehnder, AT ^{[1
]}

Parpia, JM ^{[1
]}

Craighead, HG ^{[1
]}

机构：

[1] Cornell Univ, Cornell Ctr Mat Res, Ithaca, NY 14853 USA

来源：

APPLIED PHYSICS LETTERS | 2002年 / 81卷 / 14期

关键词：

D O I：

10.1063/1.1511287

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on the resonant operation of high-quality-factor silicon nanomechanical structures in air and at room temperature. We describe techniques used to actuate and detect nanomechanical structures in atmosphere, resulting in the enhancement of the effective quality factor to above 1000 and demonstrate the potential for successful sensor operation of resonant nanomechanical structures under ambient conditions. (C) 2002 American Institute of Physics.

引用

页码：2641 / 2643

页数：3

共 18 条

[1] VERY HIGH Q-FACTOR RESONATORS IN MONOCRYSTALLINE SILICON [J].

BUSER, RA ;

DEROOIJ, NF .

SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) :323-327

[2] Measurement of mechanical resonance and losses in nanometer scale silicon wires [J].

Carr, DW ;

Evoy, S ;

Sekaric, L ;

Craighead, HG ;

Parpia, JM .

APPLIED PHYSICS LETTERS, 1999, 75 (07) :920-922

[3] Measurement of nanomechanical resonant structures in single-crystal silicon [J].

Carr, DW ;

Sekaric, L ;

Craighead, HG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (06) :3821-3824

[4] Parametric amplification in a torsional microresonator [J].

Carr, DW ;

Evoy, S ;

Sekaric, L ;

Craighead, HG ;

Parpia, JM .

APPLIED PHYSICS LETTERS, 2000, 77 (10) :1545-1547

[5] Nanofabrication and electrostatic operation of single-crystal silicon paddle oscillators [J].

Evoy, S ;

Carr, DW ;

Sekaric, L ;

Olkhovets, A ;

Parpia, JM ;

Craighead, HG .

JOURNAL OF APPLIED PHYSICS, 1999, 86 (11) :6072-6077

[6] Energy dissipation in suspended micromechanical resonators at low temperatures [J].

Harrington, DA ;

Mohanty, P ;

Roukes, ML .

PHYSICA B, 2000, 284 :2145-2146

[7] Micro-electro-mechanical-systems (MEMS) and fluid flows [J].

Ho, CM ;

Tai, YC .

ANNUAL REVIEW OF FLUID MECHANICS, 1998, 30 :579-612

[8] Thermoelastic loss in microscale oscillators [J].

Houston, BH ;

Photiadis, DM ;

Marcus, MH ;

Bucaro, JA ;

Liu, X ;

Vignola, JF .

APPLIED PHYSICS LETTERS, 2002, 80 (07) :1300-1302

[9] Single cell detection with micromechanical oscillators [J].

Ilic, B ;

Czaplewski, D ;

Zalalutdinov, M ;

Craighead, HG ;

Neuzil, P ;

Campagnolo, C ;

Batt, C .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (06) :2825-2828

[10]

INCROPERA FP, 1996, FUNDAMENTALS HEAT MA, P486

← 1 2 →