CL-TWE Mach-Zehnder electro-optic modulator based on InP-MQW optical waveguides

被引：10
|
作者：
Qian, Guang [1 ]
Niu, Bin [1 ]
Zhao, Wu [2 ]
Kan, Qiang [2 ]
Gu, Xiaowen [1 ]
Zhou, Fengjie [1 ]
Kong, Yuechan [1 ]
Chen, Tangsheng [1 ]
机构：
[1] Nanjing Elect Devices Inst, Sci & Technol Monolith Integrated Circuits & Modu, Nanjing 210016, Jiangsu, Peoples R China
[2] Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
来源：
CHINESE OPTICS LETTERS | 2019年 / 17卷 / 06期
关键词：
BANDWIDTH;
D O I：
10.3788/COL201917.061301
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In this Letter, we reported the preliminary results of an integrating periodically capacitive-loaded traveling wave electrode (CL-TWE) Mach-Zehnder modulator (MZM) based on InP-based multiple quantum well (MQW) optical waveguides. The device configuration mainly includes an optical Mach-Zehnder interferometer, a direct current electrode, two phase electrodes, and a CL-TWE consisting of a U electrode and an I electrode. The modulator was fabricated on a 3 in. InP epitaxial wafer by standard photolithography, inductively coupled plasma dry etching, wet etching, electroplating, etc. Measurement results show that the MZM exhibits a 3 dB electro-optic bandwidth of about 31 GHz, a V-pi of 3 V, and an extinction ratio of about 20 dB.
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页数：5
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